真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)是(shi)一種(zhong)(zhong)裝置(zhi),其從密(mi)封體(ti)積(ji)(ji)除去(qu)氣(qi)體(ti)分子(zi)(zi)(zi)(zi),三葉型(xing)羅(luo)茨真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)以便留(liu)下部分后面(mian)真(zhen)(zhen)(zhen)空(kong)(kong)。泵(beng)(beng)可(ke)以根據三種(zhong)(zhong)技(ji)能(neng)進行(xing)大致分類容積(ji)(ji)式(shi)泵(beng)(beng)使(shi)(shi)用(yong)(yong)一種(zhong)(zhong)機制(zhi)來反(fan)復膨脹空(kong)(kong)腔(qiang)(qiang)(qiang),允許氣(qi)體(ti)從腔(qiang)(qiang)(qiang)室(shi)流(liu)入(ru),密(mi)封空(kong)(kong)腔(qiang)(qiang)(qiang),并將(jiang)其排(pai)放(fang)到(dao)中(zhong)。動量(liang)(liang)(liang)(liang)(liang)傳(chuan)遞(di)(di)(di)泵(beng)(beng),也稱為(wei)分子(zi)(zi)(zi)(zi)泵(beng)(beng),使(shi)(shi)用(yong)(yong)高(gao)(gao)(gao)速(su)稠密(mi)流(liu)體(ti)或(huo)高(gao)(gao)(gao)速(su)旋轉葉片將(jiang)氣(qi)體(ti)分子(zi)(zi)(zi)(zi)撞出腔(qiang)(qiang)(qiang)室(shi)。誘捕(bu)(bu)泵(beng)(beng)捕(bu)(bu)獲固體(ti)或(huo)吸附狀態的(de)氣(qi)體(ti)。這包(bao)括低(di)溫泵(beng)(beng),吸氣(qi)劑和(he)離(li)子(zi)(zi)(zi)(zi)泵(beng)(beng)。正排(pai)量(liang)(liang)(liang)(liang)(liang)泵(beng)(beng)對于(yu)低(di)真(zhen)(zhen)(zhen)空(kong)(kong)是(shi)有(you)成效的(de)。動量(liang)(liang)(liang)(liang)(liang)傳(chuan)輸泵(beng)(beng)與一個或(huo)兩個正排(pai)量(liang)(liang)(liang)(liang)(liang)泵(beng)(beng)配合(he)使(shi)(shi)用(yong)(yong)是(shi)實(shi)現高(gao)(gao)(gao)真(zhen)(zhen)(zhen)空(kong)(kong)的(de)常(chang)見配置(zhi)。在(zai)(zai)(zai)這種(zhong)(zhong)配置(zhi)中(zhong),正排(pai)量(liang)(liang)(liang)(liang)(liang)泵(beng)(beng)有(you)兩個目的(de)。在(zai)(zai)(zai)動量(liang)(liang)(liang)(liang)(liang)傳(chuan)遞(di)(di)(di)泵(beng)(beng)可(ke)用(yong)(yong)于(yu)獲得高(gao)(gao)(gao)真(zhen)(zhen)(zhen)空(kong)(kong)之前,它在(zai)(zai)(zai)被(bei)抽空(kong)(kong)的(de)容器中(zhong)獲得粗真(zhen)(zhen)(zhen)空(kong)(kong),因為(wei)動量(liang)(liang)(liang)(liang)(liang)傳(chuan)遞(di)(di)(di)泵(beng)(beng)不能(neng)在(zai)(zai)(zai)壓下開始泵(beng)(beng)送。其次,正排(pai)量(liang)(liang)(liang)(liang)(liang)泵(beng)(beng)通(tong)過將(jiang)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)中(zhong)的(de)置(zhi)換(huan)分子(zi)(zi)(zi)(zi)的(de)積(ji)(ji)聚抽空(kong)(kong)到(dao)低(di)真(zhen)(zhen)(zhen)空(kong)(kong)來支撐動量(liang)(liang)(liang)(liang)(liang)傳(chuan)遞(di)(di)(di)泵(beng)(beng)。可(ke)以添(tian)加誘捕(bu)(bu)泵(beng)(beng)以達(da)到(dao)比較高(gao)(gao)(gao)真(zhen)(zhen)(zhen)空(kong)(kong),但是(shi)它們需要定期捕(bu)(bu)獲空(kong)(kong)氣(qi)分子(zi)(zi)(zi)(zi)或(huo)離(li)子(zi)(zi)(zi)(zi)的(de)表(biao)面(mian)。由于(yu)這種(zhong)(zhong)要求(qiu),它們在(zai)(zai)(zai)低(di)真(zhen)(zhen)(zhen)空(kong)(kong)和(he)高(gao)(gao)(gao)真(zhen)(zhen)(zhen)空(kong)(kong)中(zhong)的(de)可(ke)用(yong)(yong)操作時間可(ke)能(neng)短(duan)得令人無法接受,因此限制(zhi)了它們在(zai)(zai)(zai)比較高(gao)(gao)(gao)高(gao)(gao)(gao)真(zhen)(zhen)(zhen)空(kong)(kong)中(zhong)的(de)使(shi)(shi)用(yong)(yong)。
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